ANAPURNA

Platform name : ANAPURNA

Location : CEA/IRAMIS/NIMBE

Contact : Olivier Sublemontier olivier.sublemontier@cea.fr

Abstract : ANAPURNA platform (Artificial-iNtelligence-Assisted Platform for Ultimate pRoduction of NAnocomposite coatings) relies on an elaboration process « safe-by-design » on 2 inches substrates of nano-structured coatings composed of nanoparticles in a matrix combining nanoparticles jets with magnetron sputtering. This process allows to chose independently the chemical nature of the nanoparticles and the matrix in a large scale.

Technical characteristics :

The nanoparticles are delivered aerodynamically using aerodynamic lenses. The reactor can be coupled to the Flame Pyrolysis Spray reactor of FastNano or use an aerosol generator powered by a suspension of previously synthesized nanoparticles. The prototype includes 3 aerodynamic lenses allowing the simultaneous or sequential deposition of 3 different types of nanoparticles on the same surface of a substrate. The matrix material is deposited simultaneously by magnetron sputtering using 3 cathodes which can be used either simultaneously or sequentially. The resulting coating can therefore be a complex assembly with controlled thickness, homogeneous over its surface, giving rise to multifunctional coatings. The ANAPURNA platform, fully automated, will be equipped with a system for in situ and real-time characterization of the elemental composition of the coatings by laser-induced plasma spectroscopy (LIBS). AI processing of LIBS data in situ and in real time within a few years will allow a posteriori 3D elementary analysis of the coating, and therefore a faster convergence towards the desired nanocomposite.